DRYING DEVICE

WIPO Patent Application WO/2011/030607

A1

Disclosed is a drying device that prevents the dry state of coating liquids such as resist solutions from losing uniformity due to the influence of a plurality of support pins when a mother substrate for holding a plurality of display panels is supported by the support pins, even in cases which the support pins are disposed in sections that become display regions. The drying device is equipped with a closed container (2) in which the plurality of support pins (9, 10) that support the underside of the mother substrate (100) have been disposed in the interior, an exhaust pump (P1) for evaporating a solvent from a coating liquid upon the mother substrate (100) by making the interior of the closed container (2) a decompressed state at atmospheric pressure or lower, and a gas supply pump (P2) that returns the interior of the decompressed closed container (2) to an atmospheric pressure state by supplying gas to the interior of the closed container (2); and from among the plurality of support pins (9, 10), the support pins (9) that are disposed in sections that become display regions formed on the mother substrate (100) are provided with a pin heating means (31) and a pin cooling means (21) that heat and cool the support pins (9).

SAITOH TAKAO

PCT/JP2010/061314

March 17, 2011

July 02, 2010

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SHARP KK (JP)
SAITOH TAKAO

H01L21/027; B65G49/06; F26B5/04; H01L21/304; H01L21/683

JP2000181079A	2000-06-30
JPH08148417A	1996-06-07
JPH0273619A	1990-03-13
JPH10172877A	1998-06-26
JP2009099719A	2009-05-07
JP2009038231A	2009-02-19
JP2006324559A	2006-11-30
JP2006302980A	2006-11-02
JP2000047398A	2000-02-18

UENO, NOBORU (JP)
Ueno 登 (JP)

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