Title:
DRYING MACHINE AND THERMAL PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/114567
Kind Code:
A1
Abstract:
A substrate (5) on which a coated film is formed by means of a coating process is transported from a preheating unit (20) to a drying unit (40), and is dried. The preheating unit (20) does not blow hot air directly from above the substrate (5) immediately after the coated film has been formed thereon; instead, the coated film is preheated by infrared radiation and the intermittent blowing of hot air from below. The drying unit (40) promotes the evaporation of a solvent by blowing hot air directly from above and below the preheated substrate (5). Furthermore, the hot air that has sequentially passed through three ventilation boxes (25) in the preheating unit (20) is guided by a ventilation duct (35) to upper hot air emission units (45) of the drying unit (40), and the hot air that was used to heat the ceramic plates in the preheating unit (20) is reused in the drying unit (40).
Inventors:
YAMAGOSHI JUNICHI (JP)
TANAKA IWAO (JP)
ICHINOBE NOBUO (JP)
KANDA HIROYUKI (JP)
TANAKA IWAO (JP)
ICHINOBE NOBUO (JP)
KANDA HIROYUKI (JP)
Application Number:
PCT/JP2011/069629
Publication Date:
August 30, 2012
Filing Date:
August 30, 2011
Export Citation:
Assignee:
5 5 DAINIPPON SCREEN MFG CO LTD (JP)
YAMAGOSHI JUNICHI (JP)
TANAKA IWAO (JP)
ICHINOBE NOBUO (JP)
KANDA HIROYUKI (JP)
YAMAGOSHI JUNICHI (JP)
TANAKA IWAO (JP)
ICHINOBE NOBUO (JP)
KANDA HIROYUKI (JP)
International Classes:
B05C9/14; F26B13/10; H01M4/04
Foreign References:
| JP2001176502A | 2001-06-29 | |||
| JPS63305965A | 1988-12-13 | |||
| JPS618478U | 1986-01-18 | |||
| JPS56152757A | 1981-11-26 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
Hidetoshi Yoshitake (JP)
Hidetoshi Yoshitake (JP)
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Claims: