Title:
DRYING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/050080
Kind Code:
A1
Abstract:
This drying method comprises: an initial decompression and temperature-lowering step (S2) for lowering the pressure and temperature in a chamber (11) by operating a decompression pump (12a); and a drying cycle step (S3) that is repeated a plurality of times to dry an object (W) to be dried after the initial decompression and temperature-lowering step (S2). The drying cycle step (S3) is provided with a microwave heating step (S32) for irradiating the interior of the chamber (11) with microwaves to heat the object (W) to be dried in the chamber (11), and a decompression and temperature-lowering step (S33) for lowering the pressure and temperature in the chamber (11) again by operating the decompression pump (12a), with the microwave irradiation stopped, after the microwave heating step (S32).
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Inventors:
TANAKA TATSUMI (JP)
Application Number:
PCT/JP2021/030557
Publication Date:
March 10, 2022
Filing Date:
August 20, 2021
Export Citation:
Assignee:
FUJI SHOJI CO LTD (JP)
International Classes:
F26B5/04; A61F13/53; B09B3/00; F26B3/347; F26B5/14; F26B21/10
Foreign References:
| JPS5135155A | 1976-03-25 | |||
| JP2013221667A | 2013-10-28 | |||
| KR101184125B1 | 2012-09-21 | |||
| JP2001054730A | 2001-02-27 | |||
| JP2020085346A | 2020-06-04 | |||
| JP2016220635A | 2016-12-28 | |||
| JPH0483573A | 1992-03-17 | |||
| JPS5735277A | 1982-02-25 | |||
| JPH02124488U | 1990-10-12 | |||
| JP4474506B2 | 2010-06-09 | |||
| JP2020085346A | 2020-06-04 |
Other References:
See also references of EP 4191180A4
Attorney, Agent or Firm:
AICHI, TAKAHASHI, IWAKURA & ASSOCIATES (JP)
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