Title:
DUST-PREVENTING FILM
Document Type and Number:
WIPO Patent Application WO/1991/002294
Kind Code:
A1
Abstract:
A dust-preventing film comprising a pellicle frame (2), a pellicle film (1) spread across one end surface thereof, and an adhesive layer (5) that includes a hot melt-type adhesive (4) provided on the other end surfaces. The film is attached to a photomask (6) or a reticule to prevent foreign matters from adhering to the circuit patterns (7).
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Inventors:
MIYATA AKIHIRO (JP)
TAKAHASHI SHIGEYUKI (JP)
TAKAHASHI SHIGEYUKI (JP)
Application Number:
PCT/JP1990/001019
Publication Date:
February 21, 1991
Filing Date:
August 09, 1990
Export Citation:
Assignee:
DAICEL CHEM (JP)
International Classes:
G03F1/62; H01L21/027; H01L21/30; (IPC1-7): G03F1/14
Foreign References:
| JPS6075835A | 1985-04-30 | |||
| JPS6153601A | 1986-03-17 | |||
| JPS63104058A | 1988-05-09 | |||
| JPS6413152A | 1989-01-18 | |||
| JPS6448062A | 1989-02-22 |
Other References:
See also references of EP 0438602A4
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