Title:
EFEM AND EFEM SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/013506
Kind Code:
A1
Abstract:
The present invention relates to an EFEM for transferring a wafer between a wafer storage container and process equipment and, specifically, to an EFEM which can reduce the defect rate of wafers received in a wafer storage container by actively using descending air currents flowing along wall surfaces of the EFEM. The present invention relates to an EFEM system for transferring a wafer between a wafer storage container and process equipment and, specifically, to an EFEM system which can selectively achieve moisture removal from wafers and fume removal from wafers depending on conditions of the wafers by controlling the directions of descending air currents in a wafer transfer chamber according to the internal environment of a wafer storage container.
Inventors:
WOO BUM JE (KR)
KIM YOUNG CHUL (KR)
HEO JANG (KR)
KIM YOUNG CHUL (KR)
HEO JANG (KR)
Application Number:
PCT/KR2018/007743
Publication Date:
January 17, 2019
Filing Date:
July 09, 2018
Export Citation:
Assignee:
WOO BUM JE (KR)
International Classes:
H01L21/677; H01L21/67; H01L21/673
Domestic Patent References:
| WO2016205191A1 | 2016-12-22 |
Foreign References:
| US20170170042A1 | 2017-06-15 | |||
| US20030031537A1 | 2003-02-13 | |||
| US20150294888A1 | 2015-10-15 | |||
| US20170025297A1 | 2017-01-26 |
Attorney, Agent or Firm:
CHOI, Kwang Seok (KR)
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