EFG CRYSTAL GROWTH APPARATUS - ASE AMERICAS INC

Title:

EFG CRYSTAL GROWTH APPARATUS

Document Type and Number:

WIPO Patent Application WO2000057980

Kind Code:

A9

Abstract:

A new EFG (Edge-defined Film-fed Growth) crucible/die (20A) and susceptor (40A) interface design is provided which (a) overcomes the tendency for silicon feed material to form a solid mass near the hub region and (b) prevent the crucible/die from fracturing its supporting susceptor during cooldown. The new design uses a material (quartz) not wet by silicon for the standoff ring (60A); locates the crucible/die with an annular projection (124) fitting into a counterbore (126), to allow thermal expansion of the crucible/die without laterally loading the susceptor; and thickens the inner side wall (36) to reduce cold spots.

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Inventors:

CAO JEFFREY X
GIANCOLA ROBERT M
CAPRINI CHARLES G
GARCIA DAVID

Application Number:

PCT/US2000/005491

Publication Date:

November 01, 2001

Filing Date:

March 02, 2000

Export Citation:

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Assignee:

ASE AMERICAS INC (US)

International Classes:

C30B15/00; B01D9/00; C30B15/34; C30B29/06; H01L21/208; (IPC1-7): B01D9/00

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