Title:
ELASTIC WAVE DEVICE AND COMMUNICATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/204206
Kind Code:
A1
Abstract:
The present invention reduces spurious in an acoustic wave device and relaxes stress in a piezoelectric layer of the acoustic wave device. This acoustic wave device has a support substrate, a piezoelectric layer located on the support substrate, and at least one IDT electrode located on the piezoelectric layer. Where the wavelength λ of the elastic wave excited by the IDT electrode is defined as twice the electrode finger pitch of the IDT electrode, the maximum thickness of the piezoelectric layer is λ or less. The IDT electrode excites plate waves or bulk waves as elastic waves. The piezoelectric layer has a first region having a first thickness, a second region having a second thickness smaller than the first thickness, and an inclined region that is positioned between the first region and the second region and has a thickness increasing from the second region side toward the first region side.
Inventors:
KASAMATSU NAOFUMI (JP)
Application Number:
PCT/JP2023/015446
Publication Date:
October 26, 2023
Filing Date:
April 18, 2023
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2010004741A1 | 2010-01-14 |
Foreign References:
| JP2016072808A | 2016-05-09 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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