Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/241355
Kind Code:
A1
Abstract:
Provided is an elastic wave device wherein it is difficult for there to be deterioration of a characteristic due to a high-order mode. In this elastic wave device 1, on a support substrate 2, an intermediate layer 3 and a piezoelectric film 6 are stacked in that order; an IDT electrode 7 is provided on the piezoelectric film 6; and a plurality of cavities 10 are provided between the support substrate 2 and the intermediate layer 3, and/or within the intermediate layer 3.
Inventors:
YAMAMOTO KOJI (JP)
DAIMON KATSUYA (JP)
DAIMON KATSUYA (JP)
Application Number:
PCT/JP2021/018965
Publication Date:
December 02, 2021
Filing Date:
May 19, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2017013968A1 | 2017-01-26 | |||
| WO2016052129A1 | 2016-04-07 |
Foreign References:
| CN110601674A | 2019-12-20 | |||
| JP2020061684A | 2020-04-16 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Download PDF: