Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/050260
Kind Code:
A1
Abstract:
Provided is an elastic wave device capable of suppressing an out-of-band spurious. An elastic wave device 1 comprises a support substrate 2, a piezoelectric film 5 provided on the support substrate 2, and an IDT electrode 6 provided on the piezoelectric film 5. The film thickness of the piezoelectric film 5 is less than or equal to 1λ, where λ is the wavelength of an elastic wave determined by the period of the electrode fingers of the IDT electrode 6. The piezoelectric film 5 has a first region 5a and a second region 5b in the thickness direction of the piezoelectric film 5, wherein a first density which is the density of the first region 5a is different from a second density which is the density of the second region 5b.
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Inventors:
DAIMON KATSUYA (JP)
Application Number:
PCT/JP2021/031896
Publication Date:
March 10, 2022
Filing Date:
August 31, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Foreign References:
| JP2008048379A | 2008-02-28 | |||
| JP2002026687A | 2002-01-25 | |||
| JP2019220794A | 2019-12-26 | |||
| JP2012530388A | 2012-11-29 | |||
| JP2013214954A | 2013-10-17 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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