Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/085565
Kind Code:
A1
Abstract:
Provided is an elastic wave device which can suppress warping of a piezoelectric layer, even in a case where the piezoelectric layer has anisotropy in the linear expansion coefficients thereof. An elastic wave device 1 comprises: a support substrate 2; a piezoelectric layer 4 that is provided on the support substrate 2 and that has first and second principal surfaces 4a, 4b facing each other; a first electrode 5 provided on the first principal surface 4a; and a second electrode 6 which is provided on the second principal surface 4b and faces the first electrode 5. An energy confinement part is provided between the support substrate 2 and the piezoelectric layer 4. The piezoelectric layer 4 has a first direction w1 and a second direction w2 orthogonal to the first direction w1. In the piezoelectric layer 4, the linear expansion coefficient of the piezoelectric layer 4 in the first direction w1 differs from the linear expansion coefficient of the piezoelectric layer 4 in the second direction w2. At least one among the piezoelectric layer 4, the first electrode 5, and the second electrode 6 extends in parallel to the first direction w1.
Inventors:
OMURA MASASHI (JP)
Application Number:
PCT/JP2021/038079
Publication Date:
April 28, 2022
Filing Date:
October 14, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17
Domestic Patent References:
| WO2020209152A1 | 2020-10-15 | |||
| WO2018216632A1 | 2018-11-29 |
Foreign References:
| JP2005176332A | 2005-06-30 | |||
| JP2005318562A | 2005-11-10 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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