Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/102719
Kind Code:
A1
Abstract:
The present invention suppresses occurrence of cracks in a piezoelectric layer. This elastic wave device is provided with: a support substrate having a thickness in a first direction; a piezoelectric layer that is provided in the first direction of the support substrate; and an IDT electrode provided to the piezoelectric layer, and having a plurality of first electrode fingers that extend in a second direction crossing the first direction and a plurality of second electrode fingers that respectively oppose the plurality of first electrode fingers in a third direction orthogonal to the second direction and that extend in the second direction. A void part is provided at a position that partially overlaps the IDT electrode in the first direction between the support substrate and the piezoelectric layer. At least one through hole penetrating the piezoelectric layer is present at a position that does not overlap the IDT electrode in the third direction with respect to the IDT electrode. The through hole is connected to the void part. In the first direction, in a region that does not overlap the plurality of first electrode fingers and the plurality of second electrode fingers and that overlaps the void part, a reinforcement column extending in the first direction is provided in the void part.
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Inventors:
KIMURA TETSUYA (JP)
SUZUKI KATSUMI (JP)
SUZUKI KATSUMI (JP)
Application Number:
PCT/JP2021/041595
Publication Date:
May 19, 2022
Filing Date:
November 11, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2016052129A1 | 2016-04-07 | |||
| WO2016147687A1 | 2016-09-22 | |||
| WO2012073871A1 | 2012-06-07 |
Foreign References:
| JP2013214954A | 2013-10-17 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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