Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/153943
Kind Code:
A1
Abstract:
Provided is an elastic wave device capable of sufficiently suppressing ripples caused by Rayleigh waves. This elastic wave device has a piezoelectric layer 5 laminated directly or indirectly on a support substrate 3, and a first IDT electrode 6 provided on a first main surface 5a of the piezoelectric layer 5. F(x) represented by the following equation (1) is 10 or less, where te is a thickness normalized by a wavelength λ of a metal film constituting the first IDT electrode 6, tp is a thickness normalized by a wavelength λ of the piezoelectric layer 5, te/tp = x, and y g/cm3 is an average density of a total mass of the metal film normalized by the thickness te. Equation (1): F(x) = Ax2 + Bx + C
In equation (1), A and B are represented by the following formulae (2) and (3), and C = 19. Equation (2): A = 1.0392y2 + 8.4182y - 45.223
Equation (3): B = 0.0334y2 - 11.363y + 28.984
Inventors:
NAGATOMO SHO (JP)
Application Number:
PCT/JP2022/000362
Publication Date:
July 21, 2022
Filing Date:
January 07, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2020209190A1 | 2020-10-15 |
Foreign References:
| JP2019193260A | 2019-10-31 | |||
| JP2018506930A | 2018-03-08 | |||
| JP2020061742A | 2020-04-16 | |||
| JP2007143180A | 2007-06-07 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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