Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/153948
Kind Code:
A1
Abstract:
Provided is an elastic wave device that can suppress a transverse mode in an arbitrary frequency range. This elastic wave device 1 comprises: a piezoelectric substrate 2 that includes a support substrate 4 and a piezoelectric body layer 7; and an IDT electrode 8. In the IDT electrode 8, a second gap region G2 includes a plurality of gap section g2 that are located along lines of extension of a plurality of electrode fingers in the electrode finger extension direction. Through-holes 15 are provided in sections of the piezoelectric body layer 7 that overlap with the gap sections g2 in planar view. Recesses 3a (cavities) are provided in sections of the support substrate 4 that overlap with the through-holes 15 in planar view. The recesses 3a extend further to the IDT electrode 8 center side in the electrode finger extension direction than the sections in which the through-holes 15 are provided. At least one layer of the piezoelectric substrate 2 is a restricting layer that restricts the piezoelectric body layer 7 in a section overlapping with a crossover region A when viewed in planar view, and the piezoelectric body layer 7 has a protrusion 7a protruding further in the electrode finger extension direction than the at least one layer that is the restricting layer.
Inventors:
NAGATOMO SHO (JP)
Application Number:
PCT/JP2022/000395
Publication Date:
July 21, 2022
Filing Date:
January 07, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2018163860A1 | 2018-09-13 | |||
| WO2020209359A1 | 2020-10-15 |
Foreign References:
| JP2014110457A | 2014-06-12 | |||
| US20180358948A1 | 2018-12-13 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Download PDF: