Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/168797
Kind Code:
A1
Abstract:
Provided is an elastic wave device with which it is possible to suppress higher-order modes in a wide band. This elastic wave device 1 comprises: a crystal substrate 3; a silicon nitride film 4 provided on the crystal substrate 3; a lithium tantalate layer 6 (piezoelectric layer) provided on the silicon nitride film 4; and an IDT electrode 7 provided on the lithium tantalate layer 6, the IDT electrode 7 having a plurality of first and second electrode fingers 18, 19.
Inventors:
NAKAMURA KENTARO (JP)
DAIMON KATSUYA (JP)
DAIMON KATSUYA (JP)
Application Number:
PCT/JP2022/003617
Publication Date:
August 11, 2022
Filing Date:
January 31, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2019138812A1 | 2019-07-18 | |||
| WO2018097016A1 | 2018-05-31 |
Foreign References:
| JP2021005785A | 2021-01-14 | |||
| JP2019004308A | 2019-01-10 | |||
| JP2020188408A | 2020-11-19 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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