Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/173039
Kind Code:
A1
Abstract:
The present invention provides an elastic wave device in which an IDT electrode is formed of an epitaxial film. An elastic wave device 1 which comprises a piezoelectric layer 6 that is formed of lithium tantalate or lithium niobate, a dielectric film 7 that is provided on the piezoelectric layer 6, and an IDT electrode 8 that is provided on the dielectric film 7, wherein the dielectric film 7 is formed of one dielectric material that is selected from the group consisting of TiO2, TaO2, MnO2, GeO2, RuO2, OsO2, IrO2, SnO2 and PbO2.
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Inventors:
DAIMON KATSUYA (JP)
NAKAMURA KENTARO (JP)
NAKAMURA KENTARO (JP)
Application Number:
PCT/JP2022/005639
Publication Date:
August 18, 2022
Filing Date:
February 14, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2009098840A1 | 2009-08-13 | |||
| WO2014192614A1 | 2014-12-04 | |||
| WO2006016544A1 | 2006-02-16 |
Foreign References:
| JP2018195936A | 2018-12-06 | |||
| US20170155373A1 | 2017-06-01 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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