ELASTIC WAVE DEVICE

WIPO Patent Application WO/2022/186201

A1

The present invention improves a Q value. This elastic wave device comprises: a support member having a thickness in a first direction; a piezoelectric layer provided on the support member in the first direction; and an IDT electrode provided on the piezoelectric layer in the first direction and having a plurality of first electrode fingers which extend in a second direction orthogonal to the first direction, a first bus bar electrode to which the plurality of first electrode fingers are connected, a plurality of second electrode fingers which are each opposite a first electrode finger among the plurality of first electrode fingers in a third direction orthogonal to the second direction, and which extend in the second direction, a second bus bar electrode to which the plurality of second electrode fingers are connected. A hollow section is provided to the support member on the piezoelectric layer side thereof, at a position overlapping with at least part of the IDT electrode in a planar view from the first direction. At least one first through-hole which passes through the piezoelectric layer is provided to the piezoelectric layer in a region that, in a planar view from the first direction, is between at least one of the first electrode fingers and the second bus bar electrode. The first through-hole communicates with the hollow section, has a length in the third direction, and overlaps with part of at least one of the second electrode fingers in a planar view from the first direction.

KIMURA TETSUYA (JP)

PCT/JP2022/008612

September 09, 2022

March 01, 2022

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MURATA MANUFACTURING CO (JP)

H03H9/25

WO2016098526A1	2016-06-23
WO2016147687A1	2016-09-22
WO2011052551A1	2011-05-05

SAKAI INTERNATIONAL PATENT OFFICE (JP)

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