ELASTIC WAVE DEVICE

WIPO Patent Application WO/2022/209525

A1

Provided is an elastic wave device with which it is possible to suppress variations in a joint area of a support and to increase reliability.　An elastic wave device 10 according to the present invention is provided with: a piezoelectric substrate 12 including a support member 13 including a support substrate 16, and a piezoelectric layer 14 provided on the support member 13; a functional electrode provided on the piezoelectric layer 14; a first support 18 provided on the piezoelectric substrate 12 and surrounding the functional electrode; at least one second support 19 provided on the piezoelectric substrate 12 and disposed in a portion surrounded by the first support 18; and a lid portion 25 provided on the first support 18 and the second support 19. The second support 19 includes a first part 19a positioned on the lid portion 25 side, and a second part 19b positioned on the piezoelectric substrate 12 side. The first part 19a and the second part 19b are stacked one over the other. If the dimension of the second support 19 in a direction orthogonal to a direction in which the piezoelectric substrate 12, the second support 19, and the lid portion 25 are stacked is defined as the width of the second support 19, the width of the first part 19a and the width of the second part 19b are different.

KAI SEIJI (JP)
YAMAZAKI HISASHI (JP)
NAKAO TAKESHI (JP)

PCT/JP2022/008535

October 06, 2022

March 01, 2022

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MURATA MANUFACTURING CO (JP)

H03H9/25

WO2018181932A1	2018-10-04
WO2019054364A1	2019-03-21
WO2016147687A1	2016-09-22
WO2012073871A1	2012-06-07

JP2015156626A	2015-08-27
US20200321939A1	2020-10-08
JP2013528996A	2013-07-11

OSAKA FRONT (JP)

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