Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/210689
Kind Code:
A1
Abstract:
An elastic wave device 10 is provided with a piezoelectric layer 12, a plurality of electrodes (such as functional electrodes 14), a support substrate 11, a first lid portion 21, and a first support portion 22. When viewed from a stacking direction of the support substrate 11 and the piezoelectric layer 12, at least a part of a first functional electrode 14A and at least a part of a second functional electrode 14B are provided overlapping a hollow portion 13. The first lid portion 21, when viewed from the stacking direction of the support substrate 11 and the piezoelectric layer 12, overlaps the first functional electrode 14A, the second functional electrode 14B, the first wiring electrode 16A, and the second wiring electrode 16B. When viewed from the stacking direction of the support substrate 11 and the piezoelectric layer 12, at least a part of a first relay electrode 24A is provided overlapping at least one of the first functional electrode 14A and the second functional electrode 14B.
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Inventors:
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2022/015385
Publication Date:
October 06, 2022
Filing Date:
March 29, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2020100949A1 | 2020-05-22 | |||
| WO2018061950A1 | 2018-04-05 | |||
| WO2020206433A1 | 2020-10-08 |
Foreign References:
| JP2014236387A | 2014-12-15 | |||
| US20200373910A1 | 2020-11-26 | |||
| JP2009100328A | 2009-05-07 | |||
| JP2000022495A | 2000-01-21 | |||
| US5345201A | 1994-09-06 |
Attorney, Agent or Firm:
WISEPLUS IP FIRM (JP)
Download PDF:
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