Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/264914
Kind Code:
A1
Abstract:
The purpose of the present invention is to suppress the generation of an excessively bent portion of a piezoelectric layer. An elastic wave device according to the present invention comprises: a support substrate member provided with a support substrate; a piezoelectric layer provided on the support substrate member; a space section overlapping at least a portion of the piezoelectric layer; and a function electrode provided on the piezoelectric layer. The support member has the space section at a position at which at least a portion thereof overlaps the function electrode in plan view, the function electrode has a first metal layer and a second metal layer layered on at least a portion of the first metal layer, and the coefficient of linear expansion of the second metal layer is smaller than the coefficient of linear expansion of the first metal layer.
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Inventors:
KIMURA TETSUYA (JP)
Application Number:
PCT/JP2022/023269
Publication Date:
December 22, 2022
Filing Date:
June 09, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/17; H03H9/25
Domestic Patent References:
| WO2013031650A1 | 2013-03-07 | |||
| WO2021060508A1 | 2021-04-01 |
Foreign References:
| JP2010062642A | 2010-03-18 | |||
| JP2019134221A | 2019-08-08 | |||
| JP2011211460A | 2011-10-20 | |||
| JP2002135075A | 2002-05-10 | |||
| JP2018074012A | 2018-05-10 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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