Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/085368
Kind Code:
A1
Abstract:
Provided is an elastic wave device in which the functional electrode is unlikely to sustain damage. This elastic wave device 10 is equipped with: a support member 13 which includes a support substrate 16; a piezoelectric layer 14 provided on the support member 13; an IDT electrode 11 which has a plurality of electrode fingers and is provided on the piezoelectric layer 14; and a cap member 21 which is provided on the support substrate 16 so as to cover the piezoelectric layer 14. When seen from a plan view in the layering direction of the support member 13 and the piezoelectric layer 14, an acoustic reflector is formed in a position which overlaps at least a portion of the IDT electrode 11. If d is the thickness of the piezoelectric layer 14 and p is the distance between the centers of adjacent electrode fingers, d/p is 0.5 or less. The cap member 21 has a lateral wall section 24, and a top section 25 which is connected to the lateral wall section 24. The top section 25 includes a first main surface 25a which faces the IDT electrode 11, and a second main surface 25b opposite the first main surface 25a. At least the second main surface 25b of the top section 25 of the cap member 21 comprises a metal. One or more projecting parts 19 are further provided which are positioned on the first main surface 25a of the cap member 21 so as not to overlap the IDT electrode 11 when seen from the plan view. The projecting parts 19 comprise a resin.
Inventors:
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2022/041957
Publication Date:
May 19, 2023
Filing Date:
November 10, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2018198654A1 | 2018-11-01 | |||
| WO2018143044A1 | 2018-08-09 |
Foreign References:
| JP2015156626A | 2015-08-27 | |||
| JP2019121839A | 2019-07-22 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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