Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/157798
Kind Code:
A1
Abstract:
Provided is an elastic wave device capable of suppressing development of peeling of a piezoelectric layer and suppressing deterioration in electrical characteristics. An elastic wave device 1 is provided with: a support substrate 3; a piezoelectric layer 4 that is provided on the support substrate 3 and that includes a first piezoelectric layer 4A and a second piezoelectric layer 4B; a functional electrode provided on the first piezoelectric layer 4A; a bump pad 9 that is provided on the first piezoelectric layer 4A and that is electrically connected to the functional electrode; and electrode pads 8 provided on the second piezoelectric layer 4B. The first piezoelectric layer 4A and the second piezoelectric layer 4B are separated on the support substrate 3. In plan view, when the direction from the center toward an outer periphery side of the support substrate 3 is defined as outward, the second piezoelectric layer 4B is located further outward than the first piezoelectric layer 4A is.
Inventors:
YAMAJI TORU (JP)
KUZUSHITA TAKUMA (JP)
KUZUSHITA TAKUMA (JP)
Application Number:
PCT/JP2023/004756
Publication Date:
August 24, 2023
Filing Date:
February 13, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17; H03H9/25
Foreign References:
| JP2014013991A | 2014-01-23 | |||
| JP2019021998A | 2019-02-07 | |||
| JP2010045437A | 2010-02-25 | |||
| JP2010118730A | 2010-05-27 | |||
| JP2022507325A | 2022-01-18 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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