Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/190721
Kind Code:
A1
Abstract:
This elastic wave device comprises a support substrate containing a cavity portion, a piezoelectric layer provided on the support substrate, a functional electrode that is provided on the piezoelectric layer and at least partially overlaps the cavity portion in plan view along the stacking direction of the support substrate and the piezoelectric layer, and at least one structure that is provided on the piezoelectric layer and has a smaller linear thermal expansion coefficient than the piezoelectric layer. The structure includes a region other than a region of the functional electrode on the piezoelectric layer, the region being located in a region that does not overlap the cavity portion in plan view along the stacking direction.
Inventors:
INOUE KAZUNORI (JP)
MIMURA MASAKAZU (JP)
MIMURA MASAKAZU (JP)
Application Number:
PCT/JP2023/012885
Publication Date:
October 05, 2023
Filing Date:
March 29, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145
Domestic Patent References:
| WO2016147687A1 | 2016-09-22 | |||
| WO2022059759A1 | 2022-03-24 | |||
| WO2013141184A1 | 2013-09-26 |
Foreign References:
| JP2020182091A | 2020-11-05 | |||
| JP2018074012A | 2018-05-10 | |||
| JP2017118273A | 2017-06-29 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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