Title:
ELECTRIC CONNECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/015314
Kind Code:
A1
Abstract:
Provided is an electric connection device, which is used for electric tests between
a tester and an inspection object. The electric connection device includes a
probe assembly, which is fastened by a screw member toward a support member, while
interposing a wiring substrate between itself and the support member. In order
to prevent a probe substrate of the probe assembly from being deformed by the fastening
operation of the screw member, a spacer arranged through the wiring substrate
and extended through the screw member is interposed between the support member
and the probe substrate is interposed between the support member and the probe
substrate. The spacer has its two end faces formed into spherically bulging curved
faces.
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Inventors:
SATO HITOSHI (JP)
MIURA KIYOTOSHI (JP)
MIURA KIYOTOSHI (JP)
Application Number:
PCT/JP2005/014487
Publication Date:
February 08, 2007
Filing Date:
August 02, 2005
Export Citation:
Assignee:
NIHON MICRONICS KK (JP)
SATO HITOSHI (JP)
MIURA KIYOTOSHI (JP)
SATO HITOSHI (JP)
MIURA KIYOTOSHI (JP)
International Classes:
G01R1/073; H01L21/66
Domestic Patent References:
WO2003062837A1 | 2003-07-31 |
Foreign References:
JPH10260233A | 1998-09-29 | |||
JP2003035725A | 2003-02-07 |
Attorney, Agent or Firm:
MATSUNAGA, Nobuyuki et al. (7F 16-4, Toranomon 1-chom, Minato-ku Tokyo 01, JP)
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