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Title:
ELECTRICAL POTENTIAL BARRIER MODULE AND LITHOGRAPHY APPARATUS COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2023/249308
Kind Code:
A1
Abstract:
The present invention relates to an electrical potential barrier module and a lithography apparatus comprising same, and, specifically, to an electrical potential barrier module and a lithography apparatus comprising same, the module enabling a pellicle function to be performed in the lithography apparatus.

Inventors:
KIM KI-BUM (KR)
LEE JIN SEONG (KR)
Application Number:
PCT/KR2023/008152
Publication Date:
December 28, 2023
Filing Date:
June 13, 2023
Export Citation:
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Assignee:
DERKWOO SEMITECH CO LTD (KR)
International Classes:
G03F7/20
Foreign References:
KR20180067175A2018-06-20
KR20070007848A2007-01-16
JP2004332115A2004-11-25
KR20100126775A2010-12-02
KR20020016564A2002-03-04
Attorney, Agent or Firm:
CHAE, Moon Young (KR)
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