Title:
ELECTROLYTIC TREATMENT TOOL AND ELECTROLYTIC TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2018/066297
Kind Code:
A1
Abstract:
Disclosed is an electrolytic treatment tool that is used at the time of subjecting a substrate to be treated to an electrolytic treatment by using a treatment solution supplied to the substrate to be treated, the electrolytic treatment tool comprising: a flat-plate-shaped base body; and a direct electrode that is for applying a voltage between itself and the substrate to be treated while being in contact with the treatment solution, the direct electrode being provided on a surface of the base body. The surface of the electrolytic treatment tool on the side of the substrate to be treated has an uneven shape.
Inventors:
HOSHINO TOMOHISA (JP)
HAMADA MASATO (JP)
KANEKO SATOSHI (JP)
YAMAGUCHI KIYOMITSU (JP)
HAMADA MASATO (JP)
KANEKO SATOSHI (JP)
YAMAGUCHI KIYOMITSU (JP)
Application Number:
PCT/JP2017/032321
Publication Date:
April 12, 2018
Filing Date:
September 07, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C25D17/12; C25D5/00; C25D7/12; C25D17/06; C25D21/04
Domestic Patent References:
| WO2015104951A1 | 2015-07-16 |
Foreign References:
| JP2015004124A | 2015-01-08 | |||
| JP2004043952A | 2004-02-12 | |||
| JP2006265709A | 2006-10-05 | |||
| JP2003528219A | 2003-09-24 | |||
| JP2003129297A | 2003-05-08 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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