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Title:
ELECTROLYTIC TREATMENT TOOL AND ELECTROLYTIC TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2018/066315
Kind Code:
A1
Abstract:
Disclosed is an electrolytic treatment tool that subjects a substrate to be treated to an electrolytic treatment, the electrolytic treatment tool comprising: a flat-plate-shaped base body; an electrode provided to the base body; at least three elastic terminals that are provided to the base body and that come into contact with an outer circumferential portion of the substrate to be treated; and a detection unit that electrically detects that at least one of the terminals has contacted the substrate to be treated.

Inventors:
HOSHINO TOMOHISA (JP)
HAMADA MASATO (JP)
Application Number:
PCT/JP2017/032675
Publication Date:
April 12, 2018
Filing Date:
September 11, 2017
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C25D21/12
Foreign References:
JP2007138304A2007-06-07
JP2015200029A2015-11-12
JP2013166999A2013-08-29
JP2010287648A2010-12-24
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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