Title:
ELECTROMAGNET DEVICE, ELECTROMAGNET CONTROL DEVICE, ELECTROMAGNET CONTROL METHOD, AND ELECTROMAGNET SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/181919
Kind Code:
A1
Abstract:
This electromagnet device comprises a yoke that has an annular groove in the front surface thereof, an annular coil that is disposed in the groove, and an epoxy resin that is provided on the outer surface of the coil in order to secure the coil to the yoke, and a gap is provided between the outer peripheral surface of the groove in the yoke and the epoxy resin provided on the radially outside of the coil.
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Inventors:
OHASHI TOMONORI (JP)
BARADA TOSHIMITSU (JP)
YAMASAKI HIRONOBU (JP)
KUDO MISAKO (JP)
SATO ICHIJU (JP)
BARADA TOSHIMITSU (JP)
YAMASAKI HIRONOBU (JP)
KUDO MISAKO (JP)
SATO ICHIJU (JP)
Application Number:
PCT/JP2016/063698
Publication Date:
November 17, 2016
Filing Date:
May 09, 2016
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
H05H1/46; C23C14/35; H01L21/3065
Foreign References:
| JP2014158005A | 2014-08-28 | |||
| JP2001165343A | 2001-06-22 | |||
| JP2002164229A | 2002-06-07 | |||
| JP2012074972A | 2012-04-12 | |||
| JP2013102098A | 2013-05-23 | |||
| JPH0772277A | 1995-03-17 | |||
| JPS5490492A | 1979-07-18 | |||
| JPS6098822A | 1985-06-01 | |||
| JP2007132902A | 2007-05-31 | |||
| JP2012149618A | 2012-08-09 | |||
| JPH02195294A | 1990-08-01 |
Attorney, Agent or Firm:
ONO, Shinjiro et al. (JP)
Ono Shinjiro (JP)
Ono Shinjiro (JP)
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