Title:
ELECTROMECHANICAL TRANSDUCER AND ELECTRICAL DEVICE
Document Type and Number:
WIPO Patent Application WO2005025057
Kind Code:
A3
Abstract:
The electromechanical transducer (1) has a resonator element (20) and an actuator (30) for inducing an elastic deformation of the resonator element (20) dependent on the electrical input signal. For temperature stabilization, the electromechanical transducer (1) has a sensing element (40) for providing an electrical sensing signal has a function of a temperature of the resonator element (20), and a heating element (50) for heating the resonator element to reduce the temperature dependent frequency deviation to keep the resonance frequency equal to the nominal frequency at operating temperature. The heating element (50) is controlled by an electrical heating signal based on the electrical sensing signal. The resonator element may have the hating element or the sensing element; it may be part of a wheatstone bridge; it may consist of two longitudinally extendable parts (201, 202) extending in opposite directions, being attached in a support area (204) in a deformation free part (203).
Inventors:
VAN BEEK JOZEF T M (NL)
STEENEKEN PETER G (NL)
STEENEKEN PETER G (NL)
Application Number:
PCT/IB2004/051524
Publication Date:
May 06, 2005
Filing Date:
August 23, 2004
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV (NL)
VAN BEEK JOZEF T M (NL)
STEENEKEN PETER G (NL)
VAN BEEK JOZEF T M (NL)
STEENEKEN PETER G (NL)
International Classes:
H03H9/02; H03H9/24; H03L1/04; (IPC1-7): H03H9/02; H03H9/00; H03L1/04; H03H9/08
Foreign References:
| US3431392A | 1969-03-04 | |||
| US4058744A | 1977-11-15 |
Other References:
NGUYEN C T C: "MICROMACHINING TECHNOLOGIES FOR MINIATURIZED COMMUNICATION DEVICES", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 3511, 21 September 1998 (1998-09-21), pages 24 - 38, XP001085288, ISSN: 0277-786X
WAN-THAI HSU ET AL: "Mechanically temperature-compensated flexural-mode micromechanical resonators", IEDM 00-399, IEEE, 10 December 2000 (2000-12-10), pages 399 - 402, XP010531790
ANONYMOUS: "K-20 Temperature Controller", INTERNET ARTICLE, 10 December 2000 (2000-12-10), XP002308631, Retrieved from the Internet [retrieved on 20041206]
WAN-THAI HSU ET AL: "Mechanically temperature-compensated flexural-mode micromechanical resonators", IEDM 00-399, IEEE, 10 December 2000 (2000-12-10), pages 399 - 402, XP010531790
ANONYMOUS: "K-20 Temperature Controller", INTERNET ARTICLE, 10 December 2000 (2000-12-10), XP002308631, Retrieved from the Internet
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