Title:
ELECTRON BEAM DETECTION APPARATUS FOR SEMICONDUCTOR DEVICE AND ELECTRON BEAM DETECTION ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2021/103250
Kind Code:
A1
Abstract:
An electron beam detection apparatus for a semiconductor device and an electron beam detection assembly are disclosed, the electron beam detection apparatus including: a stage, which is configured to carry and hold the semiconductor device at a top surface of the stage, and is translatable in two directions orthogonal to each other; an aiming device, configured to determine a position of the semiconductor device in a coordinate system of the electron beam detection apparatus by capturing an image of the semiconductor device, the aiming device being provided with a first field of view and a first optical axis; and an electron beam detection device, configured to detect an emergent electron beam exiting the semiconductor device by projecting an electron beam to the semiconductor device, the electron beam detection device being provided with a second field of view and a second optical axis which is not consistent with the first optical axis, the electron beam detection apparatus further comprising a reflecting device configured to image a region to be detected on the semiconductor device into the aiming device by reflection of the region to be detected on the semiconductor device implemented by the reflecting device towards the aiming device; and the first field of view being projected onto a first visible region of the top surface by reflection of the reflecting device, and the second field of view being projected onto a second visible region of the top surface along an optical path of the electron beam.
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Inventors:
JIANG LEI (CN)
ZHAO YAN (CN)
ZHAO YAN (CN)
Application Number:
PCT/CN2019/128760
Publication Date:
June 03, 2021
Filing Date:
December 26, 2019
Export Citation:
Assignee:
ZHONGKE JINGYUAN ELECTRON LTD BEIJING CN (CN)
International Classes:
G01N23/2251
Foreign References:
| CN1820346A | 2006-08-16 | |||
| CN109979793A | 2019-07-05 | |||
| CN1815186A | 2006-08-09 | |||
| US20190198289A1 | 2019-06-27 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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