Title:
ELECTRON BEAM RENDERING DEVICE, ELECTRON BEAM RENDERING METHOD, AND RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2022/269951
Kind Code:
A1
Abstract:
[Problem] It has not conventionally been possible for an appropriate radiation amount when rendering a shape using an electron beam to be acquired rapidly. [Solution] An appropriate radiation amount when rendering a shape using an electron beam can be acquired rapidly by means of an electron beam rendering device comprising: a density set storage unit for storing, for each of one or more items of shape information, a set of first density information corresponding to a surface area in which shapes are included in each of two or more first small regions obtained by splitting a shape region specified by the shape information; a density set acquiring unit 33 for acquiring from the density set storage unit a first density set corresponding to each of the one or more items of shape information; a correction amount acquiring unit for acquiring correction amounts for each of two or more second small regions, the correction amounts corresponding to the one or more first density sets for each of the one or more items of shape information; a radiation amount acquiring unit for acquiring, for each of the two or more second small regions, a radiation amount of an electron beam having an intensity corresponding to the correction amounts of each of the two or more second small regions; and a rendering unit for radiating the electron beam onto each of the two or more second small regions in accordance with the radiation amount for each of the two or more second small regions.
Inventors:
HAMAJI MASAKAZU (JP)
MASUMOTO ISSEI (JP)
SUZUKI NATSUKI (JP)
MASUMOTO ISSEI (JP)
SUZUKI NATSUKI (JP)
Application Number:
PCT/JP2021/048171
Publication Date:
December 29, 2022
Filing Date:
December 24, 2021
Export Citation:
Assignee:
NIPPON CONTROL SYS CORP (JP)
IMS NANOFABRICATION GMBH (AT)
IMS NANOFABRICATION GMBH (AT)
International Classes:
H01J37/305; G03F7/20; H01L21/027
Foreign References:
| JPH1126360A | 1999-01-29 | |||
| JP2012243939A | 2012-12-10 | |||
| JP2016201472A | 2016-12-01 | |||
| JP2012212792A | 2012-11-01 | |||
| JP2007115891A | 2007-05-10 | |||
| JP2013171946A | 2013-09-02 | |||
| JP2012253316A | 2012-12-20 | |||
| JP6283180B2 | 2018-02-21 |
Attorney, Agent or Firm:
TANIGAWA, Hidekazu (JP)
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