Title:
ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2012/132230
Kind Code:
A1
Abstract:
This electron microscope (20) comprises: a first imaging device (291); a second imaging device (240)that can be moved away from transmitted light (P); and another detection device (260).
The second imaging device is disposed in an observation chamber (230) above the first imaging device, and an attachment portion (231) of the other detection device is disposed at a position rotated 90 degrees from the attachment position of the second imaging device on the same plane on which the second imaging device is disposed.
Thus, the second imaging means and the other detector can be attached compactly to the observation chamber disposed on the table surface of a mount housing, whereby an electron microscope can be provided in which workability of the devices and effective use of the table surface are achieved.
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Inventors:
NODA HIROYUKI (JP)
OONUMA MITSURU (JP)
NAGAOKI ISAO (JP)
MAMISHIN SHUICHI (JP)
OONUMA MITSURU (JP)
NAGAOKI ISAO (JP)
MAMISHIN SHUICHI (JP)
Application Number:
PCT/JP2012/001363
Publication Date:
October 04, 2012
Filing Date:
February 29, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
NODA HIROYUKI (JP)
OONUMA MITSURU (JP)
NAGAOKI ISAO (JP)
MAMISHIN SHUICHI (JP)
NODA HIROYUKI (JP)
OONUMA MITSURU (JP)
NAGAOKI ISAO (JP)
MAMISHIN SHUICHI (JP)
International Classes:
H01J37/244; H01J37/16; H01J37/26
Foreign References:
| JPH08138609A | 1996-05-31 | |||
| JPH06231719A | 1994-08-19 | |||
| JPH09223478A | 1997-08-26 | |||
| JP2003331773A | 2003-11-21 | |||
| JPH0982263A | 1997-03-28 | |||
| JPH0982263A | 1997-03-28 | |||
| JPH09223478A | 1997-08-26 | |||
| JP2003331773A | 2003-11-21 |
Other References:
See also references of EP 2696363A4
Attorney, Agent or Firm:
INOUE, Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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Claims: