Title:
ELECTRON SOURCE AND ELECTRON BEAM DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2018/159056
Kind Code:
A1
Abstract:
Provided are an electron source usable stably over a long period of time even if a hexaboride compound is used, and an electron beam device using this electron source. The electron source comprises: a metallic filament (103); a metal tube (112) fixed onto the filament (103) and having a plurality of recessed portions (117) disposed in at least two axial directions in the outer periphery thereof so as to surround a central axis; and a columnar hexaboride compound tip (104) wherefrom electrons are released, disposed so as to protrude from the interior of the metal tube (112) to the side facing away from the filament (103), and in contact with the respective bottom portions of the plurality of recessed portions (117) from the metal tube (112).
Inventors:
KUSUNOKI TOSHIAKI (JP)
KASUYA KEIGO (JP)
OHSHIMA TAKASHI (JP)
HASHIZUME TOMIHIRO (JP)
ARAI NORIAKI (JP)
OSE YOICHI (JP)
KASUYA KEIGO (JP)
OHSHIMA TAKASHI (JP)
HASHIZUME TOMIHIRO (JP)
ARAI NORIAKI (JP)
OSE YOICHI (JP)
Application Number:
PCT/JP2017/044177
Publication Date:
September 07, 2018
Filing Date:
December 08, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J1/15; H01J1/16; H01J9/04; H01J37/06
Foreign References:
| JP2017157368A | 2017-09-07 | |||
| JP2014229492A | 2014-12-08 | |||
| JPH0594759A | 1993-04-16 | |||
| JPS63276848A | 1988-11-15 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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