Title:
ELECTRON SOURCE UNIT AND ELECTRIFICATION UNIT
Document Type and Number:
WIPO Patent Application WO/2016/039315
Kind Code:
A1
Abstract:
An electron source unit (3) is used in an electrification device for electrifying a processed object (PO) to a desired electric potential, and the electron source unit (3) generates electrons that excite molecules of a gas for forming electrically-charged particles that are present in a processing space (20) in which the processed object (PO) is located. The electron source unit (3) is provided with: an electron-generating source (5) for generating electrons; an electric-current-introducing terminal for supplying the electric potential to the electron-generating source (5); an electron source case (7) for accommodating the electron-generating source (5); and a mesh electrode (11) through which electrons generated by the electron-generating source (5) pass towards the outer space of the electron source case (7), the mesh electrode (11) being positioned so as to separate the outer space of the electron source case (7) and the space where the electron-generating source (5) within the electron source case (7) is located. The electrode (11) is configured to have the abovementioned desired electric potential.
Inventors:
MATSUURA SHIGEKI (JP)
ISHIHARA YOSHITOSHI (JP)
ATSUMI AKIRA (JP)
ISHIHARA YOSHITOSHI (JP)
ATSUMI AKIRA (JP)
Application Number:
PCT/JP2015/075410
Publication Date:
March 17, 2016
Filing Date:
September 08, 2015
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J37/06; G21K1/00; G21K5/04; H01J37/073; H01J37/20; H05F3/04
Foreign References:
| JPH0727047U | 1995-05-19 | |||
| JP2005259606A | 2005-09-22 | |||
| JPH01128337A | 1989-05-22 | |||
| JP2004095311A | 2004-03-25 | |||
| JPH04218941A | 1992-08-10 | |||
| JP2012018905A | 2012-01-26 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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