Title:
ELECTRON TUBE AND METHOD FOR MANUFACTURING ELECTRON TUBE
Document Type and Number:
WIPO Patent Application WO/2007/020753
Kind Code:
A1
Abstract:
A photomultiplier (1) is an electron tube provided with an envelop (5), which has
a frame (3b) whereupon an opening is formed at least at one end portion, and an upper
side substrate (2) bonded to the opening in an airtight state; and a photoelectric surface
(6) which is stored in the envelop and discharges photoelectrons in the envelop
in accordance with light entered from the external. The opening and a bonding
portion of the upper side substrate with the opening are provided with multilayer
metal films (10a, 10b), respectively. The multilayer metal films are formed
by successively stacking metal films (11a, 11b) composed of titanium, metal
films (12a, 12b) composed of platinum and multilayer metal films (13a, 13b) composed
of gold. The frame (3b) and the upper side substrate (2) are bonded by sandwiching
a bonding layer (14), which includes indium, between the multilayer metal films.
As a chromium layer is not formed on the bonding portion, deposition of chromium
oxide on the bonding portion is prevented, and even in a case where the sizes of
the envelop are reduced, airtightness at the bonding portion is stably maintained.
Inventors:
SUGIYAMA HIROYUKI (JP)
INOUE KEISUKE (JP)
KISHITA HITOSHI (JP)
SHIMOI HIDEKI (JP)
KYUSHIMA HIROYUKI (JP)
INOUE KEISUKE (JP)
KISHITA HITOSHI (JP)
SHIMOI HIDEKI (JP)
KYUSHIMA HIROYUKI (JP)
Application Number:
PCT/JP2006/312902
Publication Date:
February 22, 2007
Filing Date:
June 28, 2006
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
SUGIYAMA HIROYUKI (JP)
INOUE KEISUKE (JP)
KISHITA HITOSHI (JP)
SHIMOI HIDEKI (JP)
KYUSHIMA HIROYUKI (JP)
SUGIYAMA HIROYUKI (JP)
INOUE KEISUKE (JP)
KISHITA HITOSHI (JP)
SHIMOI HIDEKI (JP)
KYUSHIMA HIROYUKI (JP)
International Classes:
H01J5/08; H01J43/28; H01J9/26
Foreign References:
| US5568013A | 1996-10-22 | |||
| JP2004226632A | 2004-08-12 | |||
| JP2003175500A | 2003-06-24 |
Other References:
See also references of EP 1921663A4
None
None
Attorney, Agent or Firm:
HASEGAWA, Yoshiki et al. (Ginza First Bldg. 10-6, Ginza 1-chom, Chuo-ku Tokyo 61, JP)
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