Title:
ELECTRONIC DEVICE AND FORMATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/156722
Kind Code:
A1
Abstract:
The present invention provides an electronic device and a formation method therefor. A transmitting end resonance structure and a receiving end sealing cover cavity are prepared on a first wafer, and a transmitting end sealing cover cavity and a receiving end resonance structure are prepared on a second wafer, so that a transmitting end filter can be formed in a transmitting region and a receiving end filter can be formed in a receiving region after the first wafer and the second wafer are bonded. The formation method provided by the present invention can not only simplify the preparation process for the device to improve the accuracy and stability of the device, but also facilitate integrating the transmitting end filter and the receiving end filter in the same chip, thereby improving the integration degree of the device, and reducing the packaging size of the device.
Inventors:
FENG XUELI (CN)
XIANG SHAOHUA (CN)
WANG CHONG (CN)
SHAN WEIZHONG (CN)
XIANG SHAOHUA (CN)
WANG CHONG (CN)
SHAN WEIZHONG (CN)
Application Number:
PCT/CN2022/072834
Publication Date:
July 28, 2022
Filing Date:
January 19, 2022
Export Citation:
Assignee:
SEMICONDUCTOR MFG ELECTRONICS SHAOXING CO LTD (CN)
International Classes:
H03H9/70; H03H3/02; H03H3/04; H03H9/02; H03H9/205; H03H9/54; H03H9/58
Foreign References:
| CN112422101A | 2021-02-26 | |||
| CN111162755A | 2020-05-15 | |||
| CN1977450B | 2011-12-14 | |||
| CN112018229A | 2020-12-01 |
Other References:
See also references of EP 4089919A4
Attorney, Agent or Firm:
SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY (CN)
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