Title:
ELECTRONIC DEVICE, METHOD OF MANUFACTURING POWER SUPPLY BOARD AND IMAGING DEVICE, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE AND ELECTRON SOURCE BOARD
Document Type and Number:
WIPO Patent Application WO/2000/050246
Kind Code:
A1
Abstract:
A device for manufacturing an electronic device comprises deaeration means (103) for removing gas dissolving in a liquid (107) that includes the materials of an electronic device; nozzle means for ejecting liquid (107) in the form of droplets (6); and means for controlling the relative position of the nozzle means (6) and a substrate (101) on which an electronic device are to be formed, and the device applies droplets to predetermined areas of the substrate (101). The deaeration means (103) includes an airtight container (105) filled with hollow fibers consisting of gas-permeable semipermeable membranes, and a vacuum device (106) for exhausting the airtight container (105).
Inventors:
MISHIMA SEIJI (JP)
Application Number:
PCT/JP2000/001024
Publication Date:
August 31, 2000
Filing Date:
February 23, 2000
Export Citation:
Assignee:
CANON KK (JP)
MISHIMA SEIJI (JP)
MISHIMA SEIJI (JP)
International Classes:
B05C5/00; B05C13/02; B05D5/12; B41J2/05; H01J9/02; B41J2/175; B41J2/19; C23C16/06; H05K3/10; (IPC1-7): B41J2/19; B41J2/175; H01J9/02
Foreign References:
| JPH1142771A | 1999-02-16 | |||
| JPS5342619B2 | 1978-11-13 | |||
| JPH08171850A | 1996-07-02 |
Attorney, Agent or Firm:
Kokubun, Takayoshi (5th Floor 17-8 Higashi-Ikebukuro 1-chome Toshima-ku, Tokyo, JP)
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