Title:
ELECTROSTATIC CHUCK DEVICE POWER SUPPLY, ELECTROSTATIC CHUCK DEVICE, AND DECHUCK CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2021/176815
Kind Code:
A1
Abstract:
An electrostatic chuck device 1 is provided with a voltage applying unit 3 for applying a dechuck voltage, which is used when dechucking an object K to be held, to a first electrode 5 and a second electrode 6, wherein the dechuck voltage is constituted by a first AC voltage Va1 applied to the first electrode 5 in the form of a first waveform W1 and a second AC voltage Va2 applied to the second electrode 6 in the form of a second waveform W2 having a phase difference from the first waveform W1. The electrostatic chuck device 1 has an information output unit for outputting information about a timing at which the first waveform W1 and the second waveform W2 intersect with each other. The voltage applying unit 3 stops, on the basis of the information, the application of the dechuck voltage to the first electrode 5 and the second electrode 6.
Inventors:
TSUCHIYA TAKAHIRO (JP)
Application Number:
PCT/JP2020/048193
Publication Date:
September 10, 2021
Filing Date:
December 23, 2020
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H02N13/00; H01L21/683
Foreign References:
| JP2010087278A | 2010-04-15 | |||
| JP2001007191A | 2001-01-12 | |||
| JP2002118164A | 2002-04-19 | |||
| JPS6244332A | 1987-02-26 |
Other References:
See also references of EP 4117168A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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