Title:
ELECTROSTATIC CHUCK DEVICE AND SLEEVE FOR ELECTROSTATIC CHUCK DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/192935
Kind Code:
A1
Abstract:
An electrostatic chuck device (1) comprises a substrate (10), a stack (2) stacked on an upper surface of the substrate (10) in a thickness direction, and a ceramics layer (50) stacked on an upper surface of the stack (2) in the thickness direction. A sleeve (70) made of an insulating material is inserted into a through-hole (60) penetrating through the substrate (10) and the stack (2) in the thickness direction. An upper surface (71) of the sleeve (70) in the thickness direction has a dual-level structure including a first upper surface (72) positioned on the same plane as an upper surface (10a) of the substrate (10) in the thickness direction, and a second upper surface (73) positioned higher than the first upper surface (72) in the thickness direction of the sleeve (70) and disposed in proximity to the ceramics layer (50). In a plan view, an edge portion (2A) of the stack (2) is disposed over the first upper surface (72).
Inventors:
YAMAZAKI NOBUYOSHI (JP)
Application Number:
PCT/JP2021/008815
Publication Date:
September 30, 2021
Filing Date:
March 05, 2021
Export Citation:
Assignee:
TOMOEGAWA CO LTD (JP)
International Classes:
H01L21/683
Foreign References:
| JP2019220503A | 2019-12-26 | |||
| JP2004127956A | 2004-04-22 | |||
| JPH10233434A | 1998-09-02 | |||
| JP3128562U | 2007-01-18 |
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
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