ELECTROSTATICALLY FORCE BALANCED SILICON ACCELEROMETER

Title:

ELECTROSTATICALLY FORCE BALANCED SILICON ACCELEROMETER

Document Type and Number:

WIPO Patent Application WO1995004284

Kind Code:

A3

Abstract:

An accelerometer is fabricated by forming a proofmass and at least one associated hinge in a silicon substrate by ion implantation and the formation of an oxide support layer below the proofmass, subsequently integrally bonding two complementary proofmass and substrate structures together, and then removing the oxide support layer to leave the proofmass supported by the hinge within the body of silicon material. The proofmass may be electrically connected to a lead extending through an etched recess in one of the substrates; and the proofmass may be electrically isolated or separated from the substrates by an oxide layer and by a change in conductivity type of the semiconductor material where the hinge is structurally mounted to the substrates.

More Like This:

WO/1987/006351	ACCELEROMETER COIL MOUNTING SYSTEM
WO/2021/185581	MICROMECHANICAL COMPONENT, IN PARTICULAR ACCELERATION SENSOR OR ROTATION RATE SENSOR, HAVING A STOP ARRANGEMENT COMPRISING A FLEXIBLE-SPRING ARRANGEMENT
JP6943121	Physical quantity sensor, inertial measurement unit, mobile positioning device, portable electronic device, electronic device and mobile body

Inventors:

WARREN KEITH O

Application Number:

PCT/US1994/005588

Publication Date:

April 20, 1995

Filing Date:

May 18, 1994

Export Citation:

Click for automatic bibliography generation Help

Assignee:

LITTON SYSTEMS INC (US)

International Classes:

G01P15/08; G01P15/12; G01P15/125; G01P15/13; H01L29/84; (IPC1-7): G01P/

Foreign References:

US4679434A	1987-07-14
US4851080A	1989-07-25
US5000817A	1991-03-19
US5045152A	1991-09-03
US5116457A	1992-05-26
US5205171A	1993-04-27

Other References: