ELEMENT MAPPING DEVICE, SCANNING TRANSMISSION ELECTRON MICROSCOPE, AND ELEMENT MAPPING METHOD

WIPO Patent Application WO/2000/041206

A1

An element mapping device for easily forming an element mapping image. An electron beam transmitted through an analysis object (5) placed in a scanning transmission electron microscope strikes an element mapping device. The electron energy loss spectrum of the electron beam is produced by an electron spectroscope (11). Acceleration voltage data about elements and window information used by the two-window method is stored in a database (24). Even if the element to be analyzed is changed, the two-dimensional element distribution image can be readily ascertained. The electron beam entering the spectroscope passes through an object point (10), and hence the aberration is small and the energy stability is excellent. Therefore, the drift of the energy loss spectrum is small and thereby an element distribution of high accuracy can be obtained.

KAJI KAZUTOSHI (JP)
UEDA KAZUHIRO (JP)
KIMOTO KOJI (JP)
AOYAMA TAKASHI (JP)
TAYA SHUNROKU (JP)
ISAKOZAWA SHIGETO (JP)

PCT/JP1999/006418

July 13, 2000

November 17, 1999

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HITACHI LTD (JP)
KAJI KAZUTOSHI (JP)
UEDA KAZUHIRO (JP)
KIMOTO KOJI (JP)
AOYAMA TAKASHI (JP)
TAYA SHUNROKU (JP)
ISAKOZAWA SHIGETO (JP)

H01J37/256; (IPC1-7): H01J37/256; H01J37/22; H01J37/244; H01J37/28; H01J49/44; G01N23/225

JPH1167138A	1999-03-09
US4480220A	1984-10-30
JPH06310076A	1994-11-04
JPH06310063A	1994-11-04
JPH10213538A	1998-08-11
JPS6237857A	1987-02-18

Sakuta, Yasuo (Ltd. 5-1, Marunouchi 1-chome Chiyoda-ku Tokyo, JP)

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