Title:
END HAT FOR MAGNETRON, PROCESS FOR PRODUCING SAME, AND MAGNETRON
Document Type and Number:
WIPO Patent Application WO/2012/008580
Kind Code:
A1
Abstract:
Disclosed is an end hat for magnetrons which is constituted of sintered Mo, characterized in that the surface area ranging from the surface of the sintered Mo to a depth of 100 µm therefrom has a carbon content of 30 ppm or less and the central area ranging from the thickness-direction center of the sintered Mo to distances of ±100 µm therefrom has a carbon content of 50-300 ppm. By reducing the carbon content in the surface area, long-term reliability can be improved. The end hat for magnetrons which has high long-term reliability can be produced in a high yield.
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Inventors:
MORIOKA TSUTOMU
AOYAMA HITOSHI
AOYAMA HITOSHI
Application Number:
PCT/JP2011/066243
Publication Date:
January 19, 2012
Filing Date:
July 15, 2011
Export Citation:
Assignee:
TOSHIBA KK (JP)
TOSHIBA MATERIALS CO LTD (JP)
MORIOKA TSUTOMU
AOYAMA HITOSHI
TOSHIBA MATERIALS CO LTD (JP)
MORIOKA TSUTOMU
AOYAMA HITOSHI
International Classes:
H01J23/04
Foreign References:
| JP2000173483A | 2000-06-23 | |||
| JPH11335705A | 1999-12-07 | |||
| JPH1083765A | 1998-03-31 | |||
| JPH08339768A | 1996-12-24 | |||
| JPH01156449A | 1989-06-20 | |||
| JPS6417354A | 1989-01-20 | |||
| JPS62208527A | 1987-09-12 |
Attorney, Agent or Firm:
HATANO, Hisashi et al. (JP)
Hisashi Hatano (JP)
Hisashi Hatano (JP)
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Claims: