Title:
ENSEMBLE MANIFOLD, SYSTEM AND METHOD FOR MONITORING PARTICLES IN CLEAN ENVIRONMENTS
Document Type and Number:
WIPO Patent Application WO2002013943
Kind Code:
A3
Abstract:
A system for detecting particles in a clean environment includes an ensemble manifold (440) having a plurality of sample ports (442), a delivery port (448), and flow junction (446) having no open-close valves or other flow selectors connecting all of said sample ports to said delivery port. In one embodiment, the ensemble manifold (540) is mounted directly on a particle detector (570) using a snap-on connector. A plurality of fluid sources (442) are located in a clean environment (410), each of the fluid sources fluidically connected to one of the sample ports (442).
Inventors:
KNOLLENBERG BRIAN A
BRANDON GLENN W
BAST BRYAN
BRANDON GLENN W
BAST BRYAN
Application Number:
PCT/US2001/024832
Publication Date:
August 15, 2002
Filing Date:
August 08, 2001
Export Citation:
Assignee:
PARTICLE MEASURING SYST (US)
International Classes:
G06M11/00; G01N1/22; G01N15/00; G01N15/14; H01L21/00; G01N1/00; G01N1/24; G01N1/26; (IPC1-7): G01N1/00; G01N1/26; G01N15/02
Foreign References:
| US4860598A | 1989-08-29 | |||
| US5856623A | 1999-01-05 | |||
| US4113434A | 1978-09-12 | |||
| US5601234A | 1997-02-11 | |||
| US3643689A | 1972-02-22 | |||
| US5553496A | 1996-09-10 |
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