Title:
ETCHING DEVICE FOR SEMICONDUCTOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/217501
Kind Code:
A1
Abstract:
The present application provides an etching device for a semiconductor element, comprising a cover body, a supporting body, a quartz tube, and a lifting and lowering device. The cover body is provided with a gas inlet, a plurality of gas outlets, and a cavity communicating the gas inlet and the gas outlets; the supporting body is supported on the cover body; the quartz tube is connected to the supporting body; the upper end of the quartz tube is communicated with a gas source, and the lower end of the quartz tube extends into the gas inlet; the lifting and lowering device is provided on the cover body; and the lifting and lowering device can enable the quartz tube to downwards lower or upwards lift, so that the lower end of the quartz tube is communicated with or separated from the gas inlet. According to the etching device for the semiconductor element provided by the present application, the lifting and lowering device is provided, so that the structures and the like of manually moving away and putting back the supporting body and the quartz tube are not needed, and labor is saved. In addition, compared with the manual lifting or putting down of the supporting body and the quartz tube, the lifting or lowering of the quartz tube is achieved by means of the lifting and lowering device, and the lifting or lowering displacement of the quartz tube relative to the gas inlet can be better controlled, and thus, the quartz tube is prevented from being damaged.
Inventors:
XU JIE (CN)
YE KUIKUI (CN)
YE KUIKUI (CN)
Application Number:
PCT/CN2021/087256
Publication Date:
October 20, 2022
Filing Date:
April 14, 2021
Export Citation:
Assignee:
TAIWAN SEMICONDUCTOR MFG CO LTD (CN)
TSMC CHINA COMPANY LTD (CN)
TSMC CHINA COMPANY LTD (CN)
International Classes:
H01L21/3065; H01J37/02; H01J37/305
Foreign References:
| US5792314A | 1998-08-11 | |||
| CN101221905A | 2008-07-16 | |||
| CN101207034A | 2008-06-25 | |||
| CN101955066A | 2011-01-26 | |||
| US20010019040A1 | 2001-09-06 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
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