Title:
EUV LIGHT GENERATION DEVICE, AND METHOD FOR CONTROLLING CENTER OF GRAVITY POSITION OF EUV LIGHT
Document Type and Number:
WIPO Patent Application WO/2018/179068
Kind Code:
A1
Abstract:
An EUV light generation device 1 comprises: a plurality of EUV light sensors that measures, from mutually differing directions, the energy of EUV light generated by irradiating laser light on a target 27 supplied in a prescribed region in a chamber 2; an irradiation position adjustment unit 7 that adjusts the irradiation position of the laser light on the target supplied in the prescribed region; and a control unit 8 that controls, on the basis of the measurement results of the plurality of EUV light sensors, the irradiation position adjustment unit 7 so that the center of gravity position of the specified EUV light is in the target center of gravity position. The control unit 8 corrects the target center of gravity position on the basis of: the plurality of center of gravity positions of the EUV light obtained on the basis of the EUV light energy measured by the plurality of EUV light sensors; and parameters pertaining to the measurement energy of the EUV light corresponding to the plurality of center of gravity positions of the EUV light.
Inventors:
NISHIMURA YUICHI (JP)
UENO YOSHIFUMI (JP)
YABU TAKAYUKI (JP)
UENO YOSHIFUMI (JP)
YABU TAKAYUKI (JP)
Application Number:
PCT/JP2017/012450
Publication Date:
October 04, 2018
Filing Date:
March 27, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05G2/00
Domestic Patent References:
| WO2014030645A1 | 2014-02-27 |
Foreign References:
| JP2007109451A | 2007-04-26 | |||
| JP2014531743A | 2014-11-27 | |||
| US8598552B1 | 2013-12-03 | |||
| JP2015524599A | 2015-08-24 | |||
| JP2012199512A | 2012-10-18 | |||
| JP2014086523A | 2014-05-12 | |||
| US9536631B1 | 2017-01-03 |
Attorney, Agent or Firm:
MATSUURA, Kenzo et al. (JP)
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