Title:
EUV LIGHT GENERATION SYSTEM, EUV LIGHT GENERATION METHOD, AND THOMSON SCATTERING MEASUREMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2016/117118
Kind Code:
A1
Abstract:
An EUV light generation system according to the present disclosure may be provided with: a chamber; a target feed device for feeding a target into the interior of the chamber; a drive laser device for irradiating drive pulse laser light onto the target to produce a plasma and generate EUV light; a probe laser device for irradiating probe pulse laser light onto the plasma to generate Thomson scattering light; a spectrometer for measuring the spectral waveform of ion term of the Thomson scattering light; and a wavelength filter arranged on the stage prior to the spectrometer, the wavelength filter inhibiting entry into the spectrometer of light, from within the light including the Thomson scattering light, having a prescribed wavelength substantially identical to the wavelength of the probe pulse laser light.
Inventors:
TOMITA KENTARO (JP)
UCHINO KIICHIRO (JP)
YANAGIDA TATSUYA (JP)
WAKABAYASHI OSAMU (JP)
TOMURO HIROAKI (JP)
UCHINO KIICHIRO (JP)
YANAGIDA TATSUYA (JP)
WAKABAYASHI OSAMU (JP)
TOMURO HIROAKI (JP)
Application Number:
PCT/JP2015/051874
Publication Date:
July 28, 2016
Filing Date:
January 23, 2015
Export Citation:
Assignee:
UNIV KYUSHU NAT UNIV CORP (JP)
GIGAPHOTON INC (JP)
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Foreign References:
| JP2013093308A | 2013-05-16 |
Other References:
KENTARO TOMITA ET AL.: "A Collective Laser Thomson Scattering System for Diagnostics of Laser -Produced Plasmasfor Extreme Ultraviolet Light Sources", APPLIED PHYSICS EXPRESS, vol. 6, no. 7, pages 076101 - 1 - 076101-4
KENTARO TOMITA: "EUV Kogen-yo Laser Seisei Sn Plasma no Thomson Sanran Keisoku System Kaihatsu", Taiwan, Retrieved from the Internet [retrieved on 20150403]
KENTARO TOMITA ET AL.: "Collective Thomson Scattering Diagnostics of EUV Plasmas", J. PLASMA FUSION RESEARCH SERIES, vol. 8, 2009, pages 488 - 491
KENTARO TOMITA: "EUV Kogen-yo Laser Seisei Sn Plasma no Thomson Sanran Keisoku System Kaihatsu", Taiwan, Retrieved from the Internet
KENTARO TOMITA ET AL.: "Collective Thomson Scattering Diagnostics of EUV Plasmas", J. PLASMA FUSION RESEARCH SERIES, vol. 8, 2009, pages 488 - 491
Attorney, Agent or Firm:
TSUBASA PATENT PROFESSIONAL CORPORATION (JP)
Patent business corporation wings international patent firm (JP)
Patent business corporation wings international patent firm (JP)
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