Title:
EVAPORATION SOURCE APPARATUS AND EVAPORATION SOURCE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2023/216313
Kind Code:
A1
Abstract:
An evaporation source apparatus, comprising a vacuum chamber (10), and a base (20), at least one vacuum box (30) and at least one control valve (40) located in the vacuum chamber (10). The at least one vacuum box (30) is arranged on the base (20), and a crucible (301) is arranged in the vacuum box (30). The vacuum box (30) is connected to the control valve (40). The control valve (40) comprises a first pipe opening (401) and a second pipe opening (402) arranged opposite to each other, the first pipe opening (401) is in communication with the vacuum box (30), and the second pipe opening (402) is in communication with the vacuum chamber (10).
Inventors:
SUN LIANG (CN)
YANG JUN (CN)
YANG JUN (CN)
Application Number:
PCT/CN2022/094413
Publication Date:
November 16, 2023
Filing Date:
May 23, 2022
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
C23C14/24
Foreign References:
| JP2012057235A | 2012-03-22 | |||
| CN114427078A | 2022-05-03 | |||
| CN107400859A | 2017-11-28 | |||
| CN2900551Y | 2007-05-16 | |||
| CN108004510A | 2018-05-08 | |||
| JP2006274284A | 2006-10-12 | |||
| JP2006274370A | 2006-10-12 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
Download PDF: