Title:
EXCIMER LAMP
Document Type and Number:
WIPO Patent Application WO/2009/028720
Kind Code:
A1
Abstract:
An excimer lamp (I) comprises a discharge gas and electrodes for applying voltage
to the discharge gas. The frequency F (MHz) of the voltage applied to the electrodes
is regulated with respect to the pressure P (MPa) of the discharge gas so as to satisfy
the following relation (I). F>0.764P-0.316 (I) Another excimer
lamp (II) comprises a discharge vessel containing discharge gas therein and
electrodes for applying voltage to the discharge gas. The concentration of the
residual air in the discharge vessel is 2500 ppb or less. According to the excimer
lamp (I), discharge at relatively low voltage, i.e., glow-like discharge can
be maintained. Even if the discharge gas pressure increases, the radiation intensity
of the excimer light can be increased without overtemperature of the excimer
lamp. According to the excimer lamp (II), excimer light of higher output can be
radiated.
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Inventors:
GOJUKI MIKIHIKO (JP)
OHSHIMA HIROYOSHI (JP)
OHSHIMA HIROYOSHI (JP)
Application Number:
PCT/JP2008/065800
Publication Date:
March 05, 2009
Filing Date:
August 27, 2008
Export Citation:
Assignee:
HOYA CANDEO OPTRONICS CORP (JP)
GOJUKI MIKIHIKO (JP)
OHSHIMA HIROYOSHI (JP)
GOJUKI MIKIHIKO (JP)
OHSHIMA HIROYOSHI (JP)
International Classes:
H01J65/00; H01J9/39
Domestic Patent References:
| WO2006114988A1 | 2006-11-02 |
Attorney, Agent or Firm:
NAKAMURA, Shizuo (ST Bldg.24-10, Taito 2-chom, Taito-ku Tokyo 16, JP)
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