Title:
EXCIMER LAMP
Document Type and Number:
WIPO Patent Application WO/2009/113449
Kind Code:
A1
Abstract:
An excimer lamp (10) is provided with a single tube-like discharge container (11) in which a discharge space (15) is formed and a discharge gas is filled in the discharge space (15), an electrode pair (13, 14) arranged along both outer opposite side surfaces of the discharge container (11) and an outer tube (12) for covering the electrode pair (13, 14). A space defined between the outer tube (12) and the discharge container (11) is made to be vacuum necessary and sufficient to prevent electric discharging. Alternatively, an insulating space (18) defined between the outer tube (12) and the discharge container (11) is filled with an arc-extinguishing gas.
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Inventors:
YASUDA MAKOTO (JP)
KOBAYASHI GO (JP)
KOBAYASHI GO (JP)
Application Number:
PCT/JP2009/054232
Publication Date:
September 17, 2009
Filing Date:
February 27, 2009
Export Citation:
Assignee:
ORC MFG CO LTD (JP)
YASUDA MAKOTO (JP)
KOBAYASHI GO (JP)
YASUDA MAKOTO (JP)
KOBAYASHI GO (JP)
International Classes:
H01J65/00; H01J61/12; H01J61/26; H01J61/34
Domestic Patent References:
| WO2006114988A1 | 2006-11-02 |
Foreign References:
| JP2007234327A | 2007-09-13 | |||
| JPH0896748A | 1996-04-12 | |||
| JPH0325850A | 1991-02-04 | |||
| JP2007324034A | 2007-12-13 | |||
| JP2003217505A | 2003-07-31 | |||
| JPH05275067A | 1993-10-22 |
Attorney, Agent or Firm:
MATSUURA, Takashi (Marunouchi 3-chomeChiyoda-ku, Tokyo 05, JP)
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