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Title:
EXCIMER LAMP
Document Type and Number:
WIPO Patent Application WO/2013/042700
Kind Code:
A1
Abstract:
This excimer lamp is provided with a light emitting tube having an outer tube and an inner tube disposed within the outer tube, and an outside electrode is disposed on the peripheral side of the outside tube. On the other hand, an inside electrode is disposed along the axial direction in a space formed inside the inner tube. A discharge space is formed between the outer tube and inner tube, and discharge gas is sealed therein. Furthermore, the inside electrode is not in contact with the inner tube, so a dielectric barrier discharge arises in the discharge space while a corona discharge arises between the inner tube and the inside electrode.

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Inventors:
KOBAYASHI GO (JP)
SERIZAWA IZUMI (JP)
KURANO MASAHIRO (JP)
NIITSU YASUJI (JP)
Application Number:
PCT/JP2012/073987
Publication Date:
March 28, 2013
Filing Date:
September 20, 2012
Export Citation:
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Assignee:
ORC MFG CO LTD (JP)
International Classes:
H01J65/00
Domestic Patent References:
WO2011007663A12011-01-20
Foreign References:
JPH04223039A1992-08-12
JP2009230867A2009-10-08
JP2008169114A2008-07-24
JP2010003437A2010-01-07
JP2006004701A2006-01-05
JP2009096693A2009-05-07
JP2009502719A2009-01-29
JPH06271302A1994-09-27
JP2007073412A2007-03-22
JP2002540583A2002-11-26
Attorney, Agent or Firm:
MATSUURA TAKASHI (JP)
Takashi Matsuura (JP)
Download PDF:
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Claims:



 
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