Title:
EXHAUST GAS COMBUSTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/018576
Kind Code:
A1
Abstract:
Provided is an exhaust gas combustion apparatus such that clogging of a nozzle end can be prevented for a long period and a long operating period can be maintained even when exhaust gas is introduced from a plurality of process chambers for multi-burner processing. Because pilot burner flame discharged out of a second combustion nozzle (47) and main burner flame discharged out of a first combustion nozzle (45) are reducing flames, a sufficiently oxygen-deficient area is formed under exhaust gas nozzles (43) as a reducing area. In this portion, complete oxidation of exhaust gas does not occur, so that silica as a combustion oxide of silane gas does not become attached to and thereby clog the end portions and the like of the exhaust gas nozzles (43), the first combustion nozzle (45), or the second combustion nozzle (47). Meanwhile, an air supply nozzle (63) disposed under the reducing area supplies a sufficient amount of air for complete combustion such that complete oxidation of exhaust gas occurs at a position beyond the reducing area.
Inventors:
YAMADA TOSHIKI (JP)
KAMAKURA ISAO (JP)
KAMAKURA ISAO (JP)
Application Number:
PCT/JP2012/068648
Publication Date:
February 07, 2013
Filing Date:
July 24, 2012
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
YAMADA TOSHIKI (JP)
KAMAKURA ISAO (JP)
YAMADA TOSHIKI (JP)
KAMAKURA ISAO (JP)
International Classes:
F23G7/06; F23D14/02
Foreign References:
| JPH11218317A | 1999-08-10 | |||
| JPH109551A | 1998-01-16 | |||
| JP2008540990A | 2008-11-20 |
Attorney, Agent or Firm:
SHIINA, Masatoshi (JP)
Masatoshi Shiina (JP)
Masatoshi Shiina (JP)
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Claims: